GB/T 11164-2011
ActiveVacuum coating plant generic specification
真空镀膜设备通用技术条件
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and marking for vacuum coating equipment. It is applied in the manufacturing and quality verification of physical vapor deposition (PVD) systems used for applying thin films on substrates in industries such as optics, electronics, and decorative coatings. The standard ensures performance consistency and safety across various vacuum coating plant designs.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.