GB/T 46191-2025
ActiveElectronic grade pentakis（dimethylamide）tantalum
电子级五（二甲氨基）钽
Application Summary AI generated
GB/T 46191-2025 specifies the technical requirements, test methods, inspection rules, and packaging for electronic grade pentakis(dimethylamide)tantalum, a high-purity precursor used in atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes. It applies to the manufacturing of tantalum-based thin films for semiconductor devices, such as diffusion barriers and gate electrodes in integrated circuits. The standard ensures consistent purity and performance in microelectronics fabrication.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.