GB/T 46178-2025
ActiveElectronic grade tetrakis（dimethylamide）titanium
电子级四（二甲氨基）钛
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for electronic grade tetrakis(dimethylamide)titanium. It is applied in the semiconductor industry as a precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes to produce titanium-containing thin films. The standard ensures high purity and consistent quality of the chemical for use in advanced integrated circuit manufacturing.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.