GB/T 44919-2024
ActiveMicro-electromechanical systems （MEMS）technology—Bulge test method for measuring mechanical properties of thin films
微机电系统（MEMS）技术 薄膜力学性能的鼓胀试验方法
Application Summary AI generated
This standard specifies the bulge test method for measuring the mechanical properties of thin films used in micro-electromechanical systems (MEMS). It is applied in the design, manufacturing, and quality control of MEMS devices, such as pressure sensors, accelerometers, and micro-actuators, where accurate knowledge of film elasticity, residual stress, and fracture strength is critical. The standard provides a uniform testing protocol for engineers and researchers in semiconductor and micro-device industries to characterize thin-film materials under controlled pressure loading.
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