GB/T 44849-2024
ActiveMicro-electromechanical systems (MEMS) technology—Forming limit measuring method of metallic film materials
微机电系统（MEMS）技术 金属膜材料成形极限测量方法
Application Summary AI generated
This standard specifies a method for measuring the forming limit of metallic film materials used in micro-electromechanical systems (MEMS). It is applied in the design, fabrication, and quality control of MEMS devices, such as micro-sensors and micro-actuators, to evaluate the maximum deformation a metal film can withstand before failure. The standard is particularly relevant for engineers and manufacturers in the semiconductor and microelectronics industries who need to ensure reliability during thin-film processing and device operation.
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