GB/T 43773-2024
ActiveElectronic gas—Carbonyl sulfide
电子气体 羰基硫
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for electronic-grade carbonyl sulfide (COS) gas. It is applied in the semiconductor and microelectronics industries as a critical precursor for chemical vapor deposition (CVD) processes, particularly in the production of thin films and high-k dielectric layers. The standard ensures the purity and consistency of COS used in advanced chip manufacturing and related electronic material synthesis.
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