GB/T 43772-2024
ActiveElectronic gas—Carbon dioxide
电子气体 二氧化碳
Application Summary AI generated
This standard specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for carbon dioxide used as an electronic gas. It is applied in the semiconductor and microelectronics industries for processes such as wafer cleaning, etching, and critical point drying, where high-purity carbon dioxide is essential to prevent contamination and ensure device performance.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.