GB/T 42158-2023

Active

Micro-electromechanical systems technology（MEMS） —Description and measurement methods for micro trench and pyramidal needle structures

微机电系统（MEMS）技术 微沟槽和棱锥式针结构的描述和测量方法

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
Active
Issue Date
2023-03-17
Implementation
2023-07-01
Centralized Committee
国家标准委
Issuing Authority
国家市场监督管理总局、国家标准化管理委员会

Application Summary AI generated

This standard specifies the terminology, description parameters, and measurement methods for micro trench and pyramidal needle structures used in MEMS devices. It is applied in the manufacturing and quality control of microsensors, microactuators, and probe-based systems, particularly for characterizing etched silicon structures in semiconductor fabrication. The standard ensures consistent dimensional and geometric evaluation across research, development, and production environments.

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