GB/T 41853-2022

Active

Semiconductor devices—Micro-electromechanical devices—Wafer to wafer bonding strength measurement

半导体器件 微机电器件 晶圆间键合强度测量

Standard Type
GBT
ICS
31.080.99
CCS
L55
Status
Active
Issue Date
2022-10-12
Implementation
2022-10-12
Centralized Committee
国家标准委
Issuing Authority
国家市场监督管理总局、国家标准化管理委员会

Application Summary AI generated

This standard specifies the methods for measuring the bonding strength between wafers in micro-electromechanical systems (MEMS) manufacturing. It is applied in the semiconductor industry to ensure the reliability and quality of wafer-level packaging and 3D integration processes. The standard provides testing protocols for evaluating adhesion at bonded interfaces, critical for device performance in sensors, actuators, and other MEMS products.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.