GB/T 40129-2021
ActiveSurface chemical analysis—Secondary ion mass spectrometry—Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer
表面化学分析 二次离子质谱 飞行时间二次离子质谱仪质量标校准
Application Summary AI generated
This standard specifies the procedure for calibrating the mass scale of time-of-flight secondary ion mass spectrometers (TOF-SIMS), ensuring accurate identification of chemical species on surfaces. It is applied in surface chemical analysis laboratories and industries such as materials science, semiconductor manufacturing, and nanotechnology, where precise mass measurement is critical for characterizing thin films, contaminants, or organic layers. The calibration method is essential for quality control and research involving depth profiling or imaging of surface compositions.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.