GB/T 35315-2017
ActiveGuide for ammonia effluent handling in LED industry
LED行业用氨气处理指南
Application Summary AI generated
This standard provides technical guidance for the safe collection, treatment, and emission control of ammonia waste gas generated during the production of LED epitaxial wafers and chips. It is specifically applied in the LED manufacturing industry, where ammonia is used as a precursor gas in metal-organic chemical vapor deposition (MOCVD) processes. The guide covers system design, operation, and monitoring requirements to ensure compliance with environmental regulations and workplace safety standards.
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