GB/T 34972-2017

Active

Determination of metal content in gases—Inductively coupled plasma mass spectrometry method

电子工业用气体中金属含量的测定 电感耦合等离子体质谱法

Standard Type
GBT
ICS
71.040.40
CCS
G86
Status
Active
Issue Date
2017-11-01
Implementation
2018-02-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the use of inductively coupled plasma mass spectrometry (ICP-MS) to measure trace metal content in gases used in the electronics industry. It is applied to high-purity process gases such as nitrogen, argon, and hydrogen to ensure they meet stringent contamination limits for semiconductor manufacturing and other electronic component production. The method is critical for quality control in gas supply chains and cleanroom environments where metallic impurities can compromise device performance.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.