GB/T 34971-2017
ActiveGuide for gaseous effluent handling in semiconductor industry
半导体制造用气体处理指南
Application Summary AI generated
This standard provides guidelines for the safe handling, treatment, and discharge of gaseous effluents generated during semiconductor manufacturing processes. It is applied in the semiconductor industry to establish procedures for managing toxic, flammable, and corrosive exhaust gases from fabrication facilities, ensuring compliance with environmental and safety regulations. The guide is used by engineers and facility operators to design gas abatement systems and monitor effluent quality in cleanroom and production environments.
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