GB/T 34326-2017

Active

Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

表面化学分析 深度剖析 AES和XPS深度剖析时离子束对准方法及其束流或束流密度测量方法

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
Active
Issue Date
2017-09-29
Implementation
2018-08-01
Centralized Committee
中国科学院
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies methods for aligning an ion beam with the analysis area and measuring the ion beam current or current density for depth profiling in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). It is applied in surface chemical analysis laboratories and materials research facilities to ensure accurate and reproducible sputter depth profiling of thin films, coatings, and layered structures. The standard is critical for quality control and failure analysis in industries such as semiconductor manufacturing, metallurgy, and corrosion science.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.