GB/T 32817-2016
ActiveSemiconductor devices—Micro-electromechanical devices—Generic specification for MEMS
半导体器件 微机电器件 MEMS总规范
Application Summary AI generated
This standard specifies the general requirements, quality assessment procedures, and test methods for micro-electromechanical systems (MEMS) devices. It is applied in the design, manufacturing, and procurement of MEMS components such as accelerometers, pressure sensors, and micro-mirrors used in automotive, consumer electronics, and industrial automation. The standard ensures consistent performance and reliability testing across different MEMS product types.
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