GB/T 30702-2014
ActiveSurface chemical analysis―Auger electron spectroscopy and X-ray photoelectron spectroscopy―Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
表面化学分析 俄歇电子能谱和X射线光电子能谱 实验测定的相对灵敏度因子在均匀材料定量分析中的使用指南
Application Summary AI generated
This standard provides a guide for using experimentally determined relative sensitivity factors (RSFs) in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) to perform quantitative chemical analysis of homogeneous solid materials. It is applied in surface analysis laboratories within industries such as materials science, semiconductor manufacturing, and corrosion research, where accurate determination of elemental composition from spectral peak intensities is required. The standard ensures consistency and reliability when converting measured signal intensities into atomic concentrations for uniform samples.
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