GB/T 29731-2013
ActiveSurface chemical analysis - High resolution auger electron spectrometers - Calibration of energy scales for elemental and chemical-state analysis
表面化学分析 高分辨俄歇电子能谱仪 元素和化学态分析用能量标校准
Application Summary AI generated
This standard specifies the calibration procedures for the energy scale of high-resolution Auger electron spectrometers used in surface chemical analysis. It is applied in materials science, semiconductor manufacturing, and corrosion research to ensure accurate identification of elemental composition and chemical states on solid surfaces. The calibration is critical for laboratories conducting quantitative surface analysis and quality control of thin films, coatings, and nanostructures.
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