GB/T 29556-2013
ActiveSurface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - determination of lateral resolution, analysis area, and sample area viewed by the analyser
表面化学分析 俄歇电子能谱和X射线光电子能谱 横向分辨率、分析面积和分析器所能检测到的样品面积的测定
Application Summary AI generated
This standard specifies methods for measuring the lateral resolution, analysis area, and sample area viewed by the analyser in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS). It is applied in surface chemical analysis laboratories and quality control settings to ensure accurate spatial characterization of materials, such as thin films, coatings, and semiconductors. The standard is critical for verifying instrument performance and comparing results across different analytical systems.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.