GB/T 28632-2012
ActiveSurface chemical analysis － Auger electron spectroscopy and X-ray photoelectron spectroscopy － Determination of lateral resolution
表面化学分析 俄歇电子能谱和X射线光电子能谱 横向分辨率测定
Application Summary AI generated
This standard specifies methods for determining the lateral resolution of Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) instruments. It is applied in surface chemical analysis laboratories and materials science research to evaluate and compare the spatial imaging performance of these analytical techniques. The standard is critical for ensuring accurate characterization of micro-scale surface features in industries such as semiconductor manufacturing, thin-film technology, and corrosion science.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.