GB/T 28159-2011
AbolishedElectronic grade phosphoric acid
电子级磷酸
Application Summary AI generated
GB/T 28159-2011 specifies the technical requirements, test methods, inspection rules, and packaging for electronic grade phosphoric acid used in the semiconductor and microelectronics industries. It applies to the production and quality control of high-purity phosphoric acid for cleaning silicon wafers, etching processes, and as a chemical reagent in integrated circuit manufacturing. This standard ensures the acid meets strict purity levels to prevent contamination during critical electronic component fabrication.
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