GB/T 26111-2023
ActiveMicro-electromechanical system technology—Terms
微机电系统（MEMS）技术 术语
Application Summary AI generated
This standard defines a unified set of terminology for micro-electromechanical systems (MEMS), covering key concepts related to design, materials, fabrication processes, and device characterization. It is applied in the Chinese electronics industry to ensure consistent communication and documentation among engineers, researchers, and manufacturers working on MEMS sensors, actuators, and microfluidic devices. The standard is also used in technical specifications, product manuals, and testing protocols to eliminate ambiguity in cross-company and cross-disciplinary collaborations.
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