GB/T 25187-2010
AbolishedSurface chemical analysis - Auger electron spectroscopy - Description of selected instrumental performance parameters
表面化学分析 俄歇电子能谱 - 选择仪器性能参数的表述
Application Summary AI generated
This standard specifies how to describe and report key performance parameters for Auger electron spectroscopy (AES) instruments, such as energy resolution, sensitivity, and spatial resolution. It is applied in surface chemical analysis laboratories and quality control settings to ensure consistent, comparable instrument specifications across different manufacturers and testing environments. The standard is used primarily in materials science, semiconductor manufacturing, and thin-film analysis where precise surface composition measurement is critical.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.