GB/T 25186-2010

Active

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

表面化学分析 二次离子质谱 - 由离子注入参考物质确定相对灵敏度因子

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
Active
Issue Date
2010-09-26
Implementation
2011-08-01
Centralized Committee
中国科学院
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies a method for determining relative sensitivity factors (RSFs) in secondary-ion mass spectrometry (SIMS) using ion-implanted reference materials. It is applied in surface chemical analysis to enable quantitative depth profiling of trace elements in solid materials, such as semiconductors, thin films, and coatings. The standard is used by analytical laboratories and quality control engineers to calibrate SIMS instruments for accurate compositional measurement in research and industrial production.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.