GB/T 20175-2006

Abolished

Surface chemical analysis-Sputter depth profiling-Optimization using layered systems as reference materials

表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法

Standard Type
GBT
ICS
71.040.40
CCS
N33
Status
Abolished
Issue Date
2006-03-27
Implementation
2006-11-01
Centralized Committee
中国科学院
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the method for optimizing sputter depth profiling in surface chemical analysis by using layered systems as reference materials. It is applied in materials science and semiconductor industries to calibrate and improve the accuracy of depth profiling techniques, such as Auger electron spectroscopy or secondary ion mass spectrometry, when analyzing thin-film structures or coatings. The standard ensures reliable measurement of composition versus depth in layered samples.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.