GB/T 19501-2013

This standard provides a general guide for conducting electron backscatter diffraction (EBSD) analysis, specifying the fundamental principles, instrument setup, sample preparation, and data interpretation procedures. It is applied in materials science and engineering for characterizing the crystallographic orientation, phase identification, and grain boundary structure of polycrystalline materials, such as metals, ceramics, and semiconductors, within scanning electron microscopes. The standard ensures consistent and reliable EBSD measurements across research laboratories and quality control environments.