GB/T 18735-2014
ActiveMicrobeam analysis—General guide for the specification of nanometer thin reference materials for analytical transmission electron microscope (AEM/EDS)
微束分析 分析电镜(AEM/EDS)纳米薄标样通用规范
Application Summary AI generated
This standard provides guidelines for specifying nanometer-thin reference materials used in analytical transmission electron microscopes equipped with energy-dispersive X-ray spectroscopy (AEM/EDS). It is applied in microbeam analysis for calibrating and validating quantitative elemental composition measurements of thin films and nanostructures. The standard ensures consistency and accuracy in materials science, semiconductor manufacturing, and nanotechnology research.
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