GB/T 15394-1994

Active

General specification for probe tester

多探针测试台通用技术条件

Standard Type
GBT
ICS
31.240
CCS
L97
Status
Active
Issue Date
1994-12-28
Implementation
1995-08-01
Centralized Committee
工业和信息化部（电子）
Issuing Authority
国家技术监督局

Application Summary AI generated

This standard specifies the general technical requirements, test methods, inspection rules, and marking/packaging for multi-probe testers used in semiconductor wafer testing. It applies to the design, manufacturing, and quality verification of probe stations that make electrical contact with integrated circuits or discrete devices on a wafer. The standard ensures consistent performance in measuring device parameters during production and reliability testing in the electronics industry.

Related Standards

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