GB/T 11446.9-2013
ActiveTest method for particles in electronic grade water by instrument
电子级水中微粒的仪器测试方法
Application Summary AI generated
This standard specifies the instrumental test method for determining the concentration and size distribution of particles in electronic grade water. It is applied in the semiconductor, microelectronics, and flat panel display industries to ensure ultrapure water quality meets stringent cleanliness requirements during wafer rinsing and chemical processing. The method is critical for process control and contamination monitoring in cleanroom environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.