GB/T 11446.7-2013

Active

Test method for trace anion in electronic grade water by ion chromatography

电子级水中痕量阴离子的离子色谱测试方法

Standard Type
GBT
ICS
31.030
CCS
L90
Status
Active
Issue Date
2013-12-31
Implementation
2014-08-15
Centralized Committee
工业和信息化部(电子)
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the ion chromatography method for determining trace anions, such as fluoride, chloride, and sulfate, in electronic grade water. It is applied in the semiconductor, microelectronics, and flat panel display industries to verify water purity during manufacturing processes, ensuring that ultrapure water meets stringent quality requirements for rinsing and chemical dilution. The test is critical for preventing ionic contamination that could compromise device performance and yield.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.