GB/T 39516-2020
ActiveMicro nano standard samples（geometric）
微纳米标准样板（几何量）
Application Summary AI generated
GB/T 39516-2020 specifies the classification, technical requirements, calibration methods, and marking of micro-nano standard samples used for geometric measurements. It is applied in precision engineering, semiconductor manufacturing, and nanotechnology research to calibrate instruments like atomic force microscopes, scanning electron microscopes, and optical profilers. The standard ensures traceability and accuracy in measuring micro- and nano-scale features such as step heights, line widths, and surface roughness.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.