GB/T 38614-2020
ActiveMeasuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator
基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台测量方法
Application Summary AI generated
This standard specifies the measurement methods for evaluating the positioning accuracy, resolution, repeatability, and scanning linearity of nano positioning stages that use flexible hinge mechanisms and piezo actuators. It is applied in precision engineering fields such as semiconductor manufacturing, atomic force microscopy, and micro/nano manipulation systems where sub-nanometer level motion control is required. The standard provides a unified testing protocol for manufacturers and users to verify the performance of these stages in laboratory and industrial environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.