GB/T 37466-2019

Active

Laser lift-off equipment used for GaN

氮化镓激光剥离设备

Standard Type
GBT
ICS
31
CCS
L95
Status
Active
Issue Date
2019-06-04
Implementation
2019-10-01
Centralized Committee
国家标准委
Issuing Authority
国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

GB/T 37466-2019 specifies technical requirements, test methods, inspection rules, and marking/packaging standards for laser lift-off equipment used to separate gallium nitride (GaN) thin films from sapphire substrates. It is applied in the manufacturing of GaN-based optoelectronic devices such as LEDs and laser diodes, as well as in power electronics, where precise, damage-free substrate removal is critical for device performance and yield. The standard ensures equipment reliability and process consistency in semiconductor fabrication facilities.

Related Standards

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.