GB/T 34879-2017

Active

Geometrical product specifications (GPS)—Metrological characteristics and guide to uncertainty of measurement for optical confocal microscopes

产品几何技术规范(GPS) 光学共焦显微镜计量特性及测量不确定度评定导则

Standard Type
GBT
ICS
17.040.30
CCS
J04
Status
Active
Issue Date
2017-11-01
Implementation
2018-05-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the metrological characteristics, calibration methods, and procedures for evaluating measurement uncertainty specific to optical confocal microscopes. It is applied in precision engineering and manufacturing industries for the dimensional measurement of microstructures, such as surface roughness, step heights, and micro-geometry on components like semiconductors, MEMS devices, and precision molds. The standard ensures traceability and reliability of 3D surface topography measurements in quality control and research laboratories.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.