GB/T 33523.604-2022
ActiveGeometrical product specifications (GPS)—Surface texture: Areal—Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments
产品几何技术规范（GPS） 表面结构 区域法 第604部分：非接触（相干扫描干涉）式仪器的标称特性
Application Summary AI generated
This standard specifies the nominal characteristics of coherence scanning interferometry instruments used for non-contact areal surface texture measurement. It is applied in precision manufacturing and quality control contexts, such as evaluating surface roughness and form on optical components, semiconductors, and machined parts. The standard ensures consistent instrument performance and traceability for metrology laboratories and industrial inspection environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.