GB/T 33523.603-2022
ActiveGeometrical product specifications (GPS)—Surface texture: Areal—Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
产品几何技术规范（GPS） 表面结构 区域法 第603部分：非接触（相移干涉显微）式仪器的标称特性
Application Summary AI generated
This standard defines the nominal characteristics for non-contact surface texture measuring instruments using phase-shifting interferometric microscopy. It is applied in precision manufacturing and quality control contexts, such as evaluating the surface roughness and topography of optical components, semiconductor wafers, and precision-machined parts. The standard ensures consistent specification and performance verification of these instruments across metrology laboratories and industrial inspection environments.
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GB/T 14495-2009
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.