GB/T 31227-2014

Active

Test method for the surface roughness by atomic force microscope for sputtered thin films

原子力显微镜测量溅射薄膜表面粗糙度的方法

Standard Type
GBT
ICS
17.040.20
CCS
J04
Status
Active
Issue Date
2014-09-30
Implementation
2015-04-15
Centralized Committee
中国科学院
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the test method for measuring the surface roughness of sputtered thin films using an atomic force microscope (AFM). It is applied in the fields of materials science and microelectronics manufacturing, particularly for quality control and characterization of thin film coatings on substrates like semiconductors, optical components, and magnetic storage devices. The method provides a quantitative assessment of nanoscale surface topography to ensure film performance in applications such as integrated circuits, solar cells, and hard disk drives.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.