GB/T 21636-2021
ActiveMicrobeam analysis—Electron probe microanalysis (EPMA)—Vocabulary
微束分析 电子探针显微分析（EPMA） 术语
Application Summary AI generated
This standard defines the terminology and vocabulary used in electron probe microanalysis (EPMA), ensuring consistent communication among researchers, analysts, and instrument manufacturers. It is applied in materials science, geology, and semiconductor industries for the precise chemical characterization of solid samples at the micrometer scale. The standard supports quality control, failure analysis, and research by providing a unified language for describing EPMA techniques, components, and measurement parameters.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.