GB/T 20307-2006

This standard specifies the general rules for measuring nanometer-scale lengths using scanning electron microscopy (SEM), including calibration procedures, measurement conditions, and data processing methods. It is applied in metrology laboratories and industrial settings for the accurate dimensional characterization of micro- and nano-structures, such as semiconductor features, nanoparticles, and thin-film thicknesses. The standard ensures traceability and consistency in SEM-based length measurements across research, quality control, and manufacturing contexts.