GB/Z 43684-2024
ActiveNanotechnologies—Description, measurement and dimensional quality parameters of gratings
纳米技术 光栅的描述、测量和尺寸质量参数
Application Summary AI generated
This standard provides a framework for describing, measuring, and specifying the dimensional quality parameters of nanoscale gratings. It is applied in the nanotechnology and semiconductor industries for quality control and characterization of diffraction gratings used in optical devices, sensors, and metrology systems. The standard ensures consistent evaluation of grating features like pitch, line width, and uniformity across manufacturing and research contexts.
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