GB/T 6071-2003
ActiveUltra-high vacuum flange
超高真空法兰
Application Summary AI generated
GB/T 6071-2003 specifies the dimensions, materials, and sealing requirements for ultra-high vacuum flanges used in vacuum systems operating below 1.33×10⁻⁷ Pa. It is applied in industries such as semiconductor manufacturing, particle accelerators, and surface analysis equipment where leak-tight metal-sealed joints are critical. The standard ensures interchangeability and reliability of flanges in high-vacuum and ultra-high vacuum environments.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.