GB/T 5226.33-2017
ActiveElectrical safety of machinary—Electrical equipment of machines—Part 33: Requirements for semiconductor fabrication equipment
机械电气安全 机械电气设备 第33部分：半导体设备技术条件
Application Summary AI generated
This standard specifies electrical safety requirements for semiconductor fabrication equipment, covering design, installation, and testing of electrical systems to prevent hazards like electric shock or fire. It is applied in the semiconductor industry for equipment such as wafer processing tools, lithography machines, and etching systems used in cleanroom manufacturing environments. Compliance ensures that machinery meets Chinese national safety regulations for electrical components and control circuits.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.