GB/T 40577-2021
ActiveTerminology for integrated circuit(IC)manufacturing equipment
集成电路制造设备术语
Application Summary AI generated
GB/T 40577-2021 defines standardized terminology for integrated circuit manufacturing equipment, covering terms related to lithography, etching, deposition, and other fabrication processes. It is applied in the semiconductor industry for technical documentation, equipment specifications, and communication between manufacturers, suppliers, and engineers. The standard ensures consistent language in design, procurement, and quality control of IC production tools.
Related Standards
GB/T 18496.2-2005
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GB/T 17562.8-2002
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GB/T 15157.7-2002
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GB/T 18501.2-2001
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GB/T 18501.1-2001
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GB/T 18496-2001
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GB/T 17562.1-1998
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GB/T 13420-1998
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.