GB/T 39163-2020

Active

Test methods of the bonding strength for target-backing plate assemblies

靶材与背板结合强度测试方法

Standard Type
GBT
ICS
19.060
CCS
H22
Status
Active
Issue Date
2020-11-19
Implementation
2021-10-01
Centralized Committee
中国有色金属工业协会
Issuing Authority
国家市场监督管理总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies test methods for evaluating the bonding strength between a sputtering target and its backing plate assembly. It is applied in the manufacturing and quality control of physical vapor deposition (PVD) targets used in semiconductor, flat panel display, and optical coating industries. The methods ensure reliable adhesion under thermal and mechanical stresses during sputtering processes.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.