GB/T 38447-2020
ActiveMicro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration
微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法
Application Summary AI generated
This standard specifies a method for testing the fatigue life of micro-electromechanical system (MEMS) structures by inducing resonant vibration. It is applied in the design, reliability assessment, and quality control of MEMS devices, such as accelerometers, gyroscopes, and micro-mirrors, to evaluate how repeated mechanical stress affects structural integrity over time. The testing context is primarily in semiconductor fabrication and micro-device manufacturing environments.
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