GB/T 34899-2017
ActiveMicro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy
微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法
Application Summary AI generated
This standard specifies a test method for measuring surface stress in microstructures using Raman spectroscopy, focusing on the shift in Raman peaks caused by mechanical strain. It is applied in the micro-electromechanical systems (MEMS) industry for quality control and reliability assessment of microfabricated components, such as thin films, cantilevers, and membranes. The method is used during device development and production to evaluate residual stress and ensure structural integrity in sensors, actuators, and other MEMS devices.
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