GB/T 34893-2017
ActiveMicro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer
微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法
Application Summary AI generated
This standard specifies a measurement method using an optical interferometer to determine the in-plane length of microstructures within MEMS devices. It is applied in the semiconductor and microelectronics industries for quality control and characterization of MEMS components, such as accelerometers, pressure sensors, and micro-mirrors, during design validation or production testing. The method ensures precise dimensional verification critical for device performance and reliability.
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