GB/T 32815-2016
ActiveSilicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process
硅基MEMS制造技术 体硅压阻加工工艺规范
Application Summary AI generated
This standard specifies the technical requirements, process parameters, and quality control criteria for the bulk silicon piezoresistance process used in silicon-based MEMS (Micro-Electro-Mechanical Systems) fabrication. It is applied in the manufacturing of pressure sensors, accelerometers, and other microdevices that rely on piezoresistive effects for signal transduction. The standard ensures consistency and reliability in production environments, particularly for industrial and automotive sensor applications.
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