GB/T 30857-2014
ActiveStandard test method for thickness and thickness variation on sapphire substrates
蓝宝石衬底片厚度及厚度变化测试方法
Application Summary AI generated
This standard specifies a test method for measuring the thickness and thickness variation of sapphire substrates. It is applied in the metallurgy and semiconductor industries for quality control of sapphire wafers used as substrates in LED, optoelectronic, and microelectronic device manufacturing. The method ensures substrates meet dimensional tolerances critical for subsequent epitaxial growth and device fabrication processes.
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