GB/T 28277-2012

Active

Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area

硅基MEMS制造技术 微键合区剪切和拉压强度检测方法

Standard Type
GBT
ICS
31.200
CCS
L55
Status
Active
Issue Date
2012-05-11
Implementation
2012-12-01
Centralized Committee
国家标准委
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies the measurement methods for evaluating the shear and pull-press strength of micro bonding areas in silicon-based MEMS (Micro-Electro-Mechanical Systems) fabrication. It is applied in the semiconductor and microelectronics industries to ensure the mechanical reliability and quality of bonded interfaces in MEMS devices, such as sensors, actuators, and microstructures. The standard is used during manufacturing process control and product testing to verify bond integrity under mechanical stress conditions.

Related Standards

Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.