GB/T 28274-2012
ActiveSilicon-based MEMS fabrication technology - The basic regulation of layout design
硅基MEMS制造技术 版图设计基本规则
Application Summary AI generated
This standard specifies the fundamental rules for layout design in silicon-based MEMS (Micro-Electro-Mechanical Systems) fabrication. It is applied in the design and manufacturing of microsensors, microactuators, and other MEMS devices to ensure compatibility with photolithography, etching, and thin-film deposition processes. The regulation helps engineers avoid design-rule violations that could cause fabrication failures or performance degradation in integrated MEMS products.
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